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VAQORACHEMICALS
CAS Registry Number

CAS 999-97-3 — Hexamethyldisilazane, 98%

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CAS No.999-97-3
FormulaC6H19NSi2
Mol. weight161.39

Also known as: 1,1,1,3,3,3-Hexamethyldisilazane · Bis(trimethylsilyl)amine · HMDS · Hexamethylsilazane · 1,1,1-Trimethyl-N-(trimethylsilyl)silanamine · Silanamine, 1,1,1-trimethyl-N-(trimethylsilyl)- · TSL 8802 · hexamethyl disilazane

IUPAC: [dimethyl-(trimethylsilylamino)silyl]methane

Available grades of CAS 999-97-3

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